China DUV Lithography Mass Production Begins, Scaling to 20 Units by 2027

State-backed firm starts mass production of domestic DUV lithography machines. Plans target 5 units by 2026 and 20 by 2027, aiming to reduce reliance on ASML for chipmakers like ChangXin Memory.

Woofun AI reports that a Chinese state-backed enterprise has initiated mass production of domestically developed Deep Ultraviolet (DUV) lithography equipment. The manufacturer intends to deliver approximately 5 units by 2026 and expand output to roughly 20 units by 2027. While this volume remains below ASML's recent delivery of 131 immersion systems, the move supports supply chain self-sufficiency.

Sources indicate that major Chinese semiconductor firms, including SMIC, Huahong Semiconductor, and ChangXin Memory, are slated to receive these machines. ChangXin Memory is identified as a primary adopter, with successful integration potentially lowering the sector's dependence on foreign critical equipment.